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Propagation of ripples in Monte Carlo models of sputter-induced surface morphology

2005; American Physical Society; Volume: 71; Issue: 19 Linguagem: Inglês

10.1103/physrevb.71.195405

1550-235X

Emmanuel O. Yewande, Alexander K. Hartmann, Reiner Kree,

Integrated Circuits and Semiconductor Failure Analysis

Periodic ripples generated from the off-normal-incidence ion-beam bombardment of solid surfaces have been observed to propagate with a dispersion in the velocity. We investigate this ripple behavior by means of a Monte Carlo model of the erosion process, in conjuction with one of two different surface-diffusion mechanisms, representative of two different classes of materials; one is a Arrhenius-type Monte Carlo method including a term (possibly zero) that accounts for the Schwoebel effect, while the other is a thermodynamic mechanism without the Schwoebel effect. We find that the behavior of the ripple velocity and wavelength depends on the sputtering time scale, which is qualitatively consistent with experiments. Futhermore, we observe a strong temperature dependance of the ripple velocity, calling for experiments at different temperatures. Also, we observe that the ripple velocity vanishes ahead of the periodic ripple pattern.