Optical Properties of MoSi 2 /Si Multilayer Laue Lens as Nanometer X-ray Focusing Device
2008; Institute of Physics; Volume: 1; Linguagem: Inglês
10.1143/apex.1.117003
ISSN1882-0786
AutoresTakahisa Koyama, S. Ichimaru, Takuya Tsuji, Hidekazu Takano, Yasushi Kagoshima, Tadayuki Ohchi, Hisataka Takenaka,
Tópico(s)Advanced Surface Polishing Techniques
ResumoIn this study, we designed and fabricated a multilayer Laue lens (MLL) as a hard X-ray focusing device. MoSi2 and Si were chosen to form the layers by DC magnetron sputtering owing to their superior properties. The optical properties of the MLL were measured at BL24XU of SPring-8 for 20-keV X-rays. In order to confirm the effect of dynamical diffraction, far-field diffraction images were captured at various incidence angles and depths. The resultant intensity distributions showed a similar structure to those derived through calculations. An almost diffraction-limited size of 28.2 nm was obtained. The maximum local diffraction efficiency was 64.7%.
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