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Elemental analysis with the helium ion microscope

2008; American Institute of Physics; Volume: 26; Issue: 6 Linguagem: Inglês

10.1116/1.2993262

1520-8567

Sybren Sijbrandij, Bill Thompson, John Notte, Bill Ward, N. P. Economou,

X-ray Spectroscopy and Fluorescence Analysis

The newly developed helium ion microscope is an instrument well suited to high resolution surface specific imaging with several unique contrast mechanisms. In addition to its imaging capabilities, the focused helium ion beam (subnanometer in size) has recently been used for elemental analysis. The scattering probability, angular distribution, and recoil energy combine to provide valuable information about the specimen being analyzed.