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Young's modulus of thin films using depth-sensing indentation

2009; Taylor & Francis; Volume: 90; Issue: 1 Linguagem: Inglês

10.1080/09500830903334312

1362-3036

J.V. Fernandes, Jorge M. Antunes, Nataliya A. Sakharova, M.C. Oliveira, L.F. Menezes,

Advanced Surface Polishing Techniques

A new methodology for the determination of Young's modulus of thin films, using a single hardness test measurement of film/substrate composites, has been developed. It is based on a recently proposed weight function, the reciprocal of the Gao function. Firstly, results of three-dimensional numerical simulation of the Vickers hardness tests on several fictitious composites are considered. Then, the methodology is checked experimentally by using depth-sensing indentation results on real composite materials.