Kinetics of the reaction of gallium arsenide with molecular chlorine
1988; American Institute of Physics; Volume: 89; Issue: 5 Linguagem: Inglês
10.1063/1.454988
ISSN1520-9032
AutoresJae Hee Ha, E. A. Ogryzlo, S. Polyhronopoulos,
Tópico(s)Advanced Chemical Physics Studies
ResumoThe reaction of Cl2 with the (100) face of a GaAs single crystal was studied in the temperature range from 25 to 150 °C. The reaction was found to be first order in Cl2 at low pressures with an activation energy of 23.6 kcal. At pressures above 10 Torr it was found to reach a limiting rate with an activation energy of 14.2 kcal, attributable to the enthalpy of desorption of the GaCl3 product from this surface.
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