Microstructure and morphology of tin dioxide multilayer thin film gas sensors
1997; Elsevier BV; Volume: 44; Issue: 1-3 Linguagem: Inglês
10.1016/s0925-4005(97)00218-9
ISSN1873-3077
AutoresL. Sangaletti, Laura E. Depero, Á. Diéguez, G. Marca, J.R. Morante, A. Romano‐Rodrı́guez, Giorgio Sberveglieri,
Tópico(s)Analytical Chemistry and Sensors
ResumoStructural, morphological, and electrical measurements have been carried out on SnO2 multilayer thin film grown by the rheotaxial growth and thermal oxidation method on Al2O3 substrates. The analysis of X-ray and electron diffraction patterns shows that, in addition to the SnO2 cassiterite phase, a contribution from another SnO2 phase is present, which can be related to cassiterite by introducing microtwinning effects. The electrical measurements show that these thin films have a higher sensitivity towards CO with respect to the conventional single layer SnO2 sensors.
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