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Artigo Revisado por pares
BIBTEX RIS

Self-assembling GaAs mirror with electrostatic actuation using micro-origami

2004; Elsevier BV; Volume: 24; Issue: 1-2 Linguagem: Inglês

10.1016/j.physe.2004.04.028

ISSN

1873-1759

Autores

Thomas Fleischmann, K. Kubota, Pablo O. Vaccaro, T.-S Wang, S. Saravanan, Nobuo Saito,

Tópico(s)

Mechanical and Optical Resonators

Resumo

The fabrication of GaAs micro-mirrors with electrostatic actuation are fabricated using a strain-driven self-assembly mechanism. A mirror deflection of several degrees for driving voltages at 10 V was demonstrated and the dynamic response was investigated.

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