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Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds

2007; Royal Society of Chemistry; Volume: 7; Issue: 12 Linguagem: Inglês

10.1039/b714742b

1473-0197

Ut-Binh T. Giang, Dooyoung Lee, Michael R. King, Lisa A. DeLouise,

Microfluidic and Capillary Electrophoresis Applications

We present a novel method to create cavities in PDMS that is simple and exhibits wide process latitude allowing control over the radius of curvature to form shallow concave pits or deep spherical cavities.