The Thickogram: a method for easy film thickness measurement in XPS
2000; Wiley; Volume: 29; Issue: 6 Linguagem: Inglês
10.1002/1096-9918(200006)29
ISSN1096-9918
Autores Tópico(s)X-ray Spectroscopy and Fluorescence Analysis
ResumoWe describe a simple graphical method for measuring film thickness by XPS, which we call a Thickogram. This method can be used even when the film and substrate peaks have very different kinetic energies and incorporates the effects of elastic scattering within the recommended range of take-off angles. The Thickogram may also be useful when measuring film thickness by AES, though this is less commonly required than in XPS. Copyright © 2000 John Wiley & Sons, Ltd.
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