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Crystal structure of molybdenum nitride films made by reactive cathodic arc evaporation

1992; Elsevier BV; Volume: 54-55; Linguagem: Inglês

10.1016/s0257-8972(09)90060-3

1879-3347

A.J. Perry, A.Wahab Baouchi, J.H. Petersen, S. Pozder,

Semiconductor materials and devices

It is shown that δ-MoN films can be made either as a single phase or together with β-Mo2N, γ-Mo2N or the Bl cubic MoN phase by reactive cathodic arc evaporation at nitrogen partial pressures of the order of 10−2 Torr (1,33 Pa). The lattice parameters are above the equilibrium values in all cases and this is attributed to the effects of a compressive residual stress in the plane of the films. It is considered that the cubic B1 MoN phase (termed ζ-MoN here for convenience) is not a unique phase but is a metastable nitrogen supersaturated γ-Mo2N phase.