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Photo–Roll Lithography (PRL) for Continuous and Scalable Patterning with Application in Flexible Electronics

2013; Volume: 25; Issue: 45 Linguagem: Inglês

10.1002/adma.201303514

1521-4095

Jong G. Ok, Moon Kyu Kwak, Chad M. Huard, Hong Seok Youn, L. Jay Guo,

Microfluidic and Bio-sensing Technologies

A novel nanofabrication methodology for continuous, scalable, and geometry-tunable lithography is developed, named photo–roll lithography (PRL), by integrating photolithography with rollable processing. As a flexible mask attached to a quartz cylinder containing a UV source rolls over a photoresistcoated substrate, PRL realizes continuous photolithographic fabrication of various micro/nanoscale patterns with geometry that is tunable by controlling mask–substrate motions.