Integrated microfluidic linking chip for scanning probe nanolithography
2004; American Institute of Physics; Volume: 85; Issue: 1 Linguagem: Inglês
10.1063/1.1771453
ISSN1520-8842
AutoresKee Suk Ryu, Xuefeng Wang, Kashan Shaikh, David Bullen, Edgar D. Goluch, Jun Zou, Chang Liu, Chad A. Mirkin,
Tópico(s)Force Microscopy Techniques and Applications
ResumoThis letter reports an architecture for a microfluidic chip that dresses (inks) multiple nanolithography tips in a high-density array in a parallel and multiplexed fashion. The microfluidic chip consists of multiple precision patterned thin-film poly(dimethylsiloxane) (PDMS) patches serving as porous inking pads. Inking chemicals are supplied from loading reservoirs to the inking pads through microfluidic channels. The gas-permeable thin PDMS membranes allow ink molecules to diffuse through while preventing bulk liquid from overflowing or evaporating. The inking chip provides high-density inking, easy loading of inks, and reduced evaporation losses. We present the fabrication process and inking of scanning probe contact printing probes and commercial nitride probes.
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