Improvements in near-field optical performance using localized surface plasmon excitation by a scatterer-formed aperture
2003; American Institute of Physics; Volume: 83; Issue: 6 Linguagem: Inglês
10.1063/1.1600834
ISSN1520-8842
AutoresKenji Tanaka, Hiroshi Hosaka, Kiyoshi Itao, Manabu Oumi, T. Niwa, Tatsuya Miyatani, Yasuyuki Mitsuoka, Kunio Nakajima, T. Ohkubo,
Tópico(s)Integrated Circuits and Semiconductor Failure Analysis
ResumoNear-field optical performance is greatly improved using our proposed near-field structure, in which a metal scatterer formed in an aperture enhances localized surface plasmon (LSP) excitation and functions as an alternative near-field light source. Based on the design through a finite-difference time-domain method, the scatterer-formed aperture is fabricated with an electron beam technique, and its near-field optical distribution is observed using a scanning near-field optical microscope. The scatterer-formed aperture enhances the near-field optical energy due to LSP excitation, thereby realizing a significant and simultaneous improvement in throughput and spatial resolution.
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