Continuum Electrostatic Probe Theory for Large Sheaths on Spheres and Cylinders
1969; American Institute of Physics; Volume: 40; Issue: 9 Linguagem: Inglês
10.1063/1.1658255
ISSN1520-8850
Autores Tópico(s)Semiconductor materials and devices
ResumoAn approximate analysis is presented for spherical and cylindrical electrostatic probe operation under conditions such that large collision-dominated sheaths are obtained. Analytical expressions are given for the sheath growth as a function of experimentally determined parameters. If pressure and temperatures are known, use of these results makes possible the direct interpretation of electron number density from a single probe measurement.
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