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BIBTEX RIS

Monolayer resolution in medium energy ion scattering

2001; Elsevier BV; Volume: 183; Issue: 1-2 Linguagem: Inglês

10.1016/s0168-583x(01)00384-6

ISSN

1872-9584

Autores

Paul Bailey, T.C.Q. Noakes, Christopher J. Baddeley, S. P. Tear, D.P. Woodruff,

Tópico(s)

Semiconductor materials and devices

Resumo

Although medium energy ion scattering (MEIS) could be considered to be a mature technique, it continues to find new applications and new methodologies, especially in exploiting the monolayer resolution capabilities. In this paper we consider four applications which provide information with monolayer resolution and illustrate each with a practical example.

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