The precision measurement of roundness
1986; Elsevier BV; Volume: 109; Issue: 1-4 Linguagem: Inglês
10.1016/0043-1648(86)90279-6
ISSN1873-2577
Autores Tópico(s)Surface Roughness and Optical Measurements
ResumoA roundness measuring system is being developed at the National Physical Laboratory (NPL) for assessing X-ray mirrors and other axisymmetric surfaces to an accuracy approaching 1 nm. Spindle error contributes to measured radial displacement, and analyses in two and in three dimensions show that three and all six respectively of the kinematic components of error are involved. Experimental data obtained with a stylus transducer on a sphere confirm predictions of the two-dimensional analysis. In general, there is an axial plane for the transducer in which optimal performance of the spindle is obtained. For surfaces of suitable smoothness the system of laser autocollimation and slope integration developed at NPL for profilometry can be applied to the non-contact measurement of roundness to nanometre levels.
Referência(s)