Novel micro-pneumatic actuator for MEMS
2002; Elsevier BV; Volume: 97-98; Linguagem: Inglês
10.1016/s0924-4247(01)00843-3
ISSN1873-3069
AutoresSebastian Bütefisch, V. Seidemann, S. Büttgenbach,
Tópico(s)Nanofabrication and Lithography Techniques
ResumoThis paper presents a micro-pneumatic actuator utilizing a new actuation principle for micro-mechanical systems. As a first application, a micro-gripper driven by two bellow-type micro-pneumatic actuators, is described. The basic structures of the micro-pneumatic actuator and the micro-gripper are fabricated by silicon dry etching in a single etching step. The device consists of a Pyrex–silicon–Pyrex sandwich structure which was assembled by anodic bonding. Alternatively, an SU8 UV-depth lithography process was used to realize the pneumatically driven micro-gripper.
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