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High Resolution Optical Profiler

1989; SPIE; Volume: 1164; Linguagem: Inglês

10.1117/12.962817

1996-756X

Katherine Creath,

Advanced Measurement and Metrology Techniques

An interferometric optical profiler using a Videk Megaplus camera interfaced to an 80386-based computer has been developed for measuring surface roughness and three-dimensional profiles with high spatial resolution. The camera has 1320 x 1035 square pixels which are 6.8 gm on a side. Fields of view over 1024 x 1024 pixels can range from 35 gm to 4642 gm with spatial sampling intervals of 0.034 pm to 4.5 gm. The spatial resolution is limited by the optical resolution of the system. The computer system consists of a 80386 microprocessor and a floating point coprocessor, an AT compatible IQ bus, and a VGA monitor with software running under Xenix 386. Digital data from the camera is captured using a frame grabber and displayed as live video on a monitor at 7 frames per second. The rms repeatability of measurements made with this instrument is better than 0.7 nm and can be half this value with averaging. This paper describes the system and its performance along with results of measuring various samples such as gratings, diamond turned optics, magnetic media, recording heads, and plastics.