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Low-Loss Singlemode PECVD Silicon Nitride Photonic Wire Waveguides for 532–900 nm Wavelength Window Fabricated Within a CMOS Pilot Line

2013; Institute of Electrical and Electronics Engineers; Volume: 5; Issue: 6 Linguagem: Inglês

10.1109/jphot.2013.2292698

1943-0655

Ananth Z. Subramanian, Pieter Neutens, Ashim Dhakal, Roelof Jansen, Tom Claes, Xavier Rottenberg, Frédéric Peyskens, Shankar Kumar Selvaraja, Philippe Hélin, B. DuBois, Kenny Leyssens, S. Severi, Paru Deshpande, Roel Baets, Pol Van Dorpe,

Advanced Fiber Optic Sensors

PECVD silicon nitride photonic wire waveguides have been fabricated in a CMOS pilot line. Both clad and unclad single mode wire waveguides were measured at λ = 532, 780, and 900 nm, respectively. The dependence of loss on wire width, wavelength, and cladding is discussed in detail. Cladded multimode and singlemode waveguides show a loss well below 1 dB/cm in the 532-900 nm wavelength range. For singlemode unclad waveguides, losses 1 dB/cm were achieved at λ = 900 nm, whereas losses were measured in the range of 1-3 dB/cm for λ = 780 and 532 nm, respectively.