Industrial applications of laser micromachining
2000; Optica Publishing Group; Volume: 7; Issue: 2 Linguagem: Inglês
10.1364/oe.7.000056
ISSN1094-4087
Autores Tópico(s)Ocular and Laser Science Research
ResumoThe use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Microvia, ink jet printer nozzle and biomedical catheter hole drilling, thin-film scribing and micro-electro-mechanical system (MEMS) fabrication applications are reviewed.
Referência(s)