Growth of a-plane ZnO thin films on LaAlO3(100) substrate by metal-organic chemical vapor deposition
2007; Elsevier BV; Volume: 310; Issue: 4 Linguagem: Inglês
10.1016/j.jcrysgro.2007.11.073
ISSN1873-5002
AutoresJr-Sheng Tian, Mei-Hui Liang, Yen‐Teng Ho, Yuan-An Liu, Li Chang,
Tópico(s)Magnetic and transport properties of perovskites and related materials
ResumoZnO(1 1 2¯ 0) thin films were successfully grown on LaAlO3 (lanthanum aluminate) (1 0 0) substrate by atmospheric pressure metal-organic chemical vapor deposition. X-ray diffraction, atomic force microscopy, and scanning electron microscopy showed that ZnO films formed at 450 °C were composed of almost all (1 1 2¯ 0) oriented grains while (0 0 0 2) oriented ZnO grains started to appear at temperature above 550 °C. The a-plane ZnO films consisted of two types of domains with their c-axis perpendicular to each other due to LaAlO3(1 0 0) symmetry with low lattice mismatch along 〈1 1 0〉.
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