Artigo Revisado por pares

Plasma applications for biochip technology

2003; Elsevier BV; Volume: 435; Issue: 1-2 Linguagem: Inglês

10.1016/s0040-6090(03)00370-5

ISSN

1879-2731

Autores

Takanori Ichiki, Yoshinari Sugiyama, Riko Taura, Toru Koidesawa, Y. Horiike,

Tópico(s)

Innovative Microfluidic and Catalytic Techniques Innovation

Resumo

Biochip technology has emerged from the fusion of biotechnology and micro/nanofabrication technology. Biochips enable us to realize revolutionary new bioanalysis systems that can directly manipulate and analyze the micro/nano-scale world of biomolecules, organelles and cells. This paper describes a few bioanalysis systems and the microfabrication technology being developed as examples of the application of plasma technologies for upcoming nanobiotechnology. Deep dry etching of glass plates has been developed and applied to fabricate microfluidic devices that can manipulate biological cells. Moreover, ultra-high-rate localized etching of silicon wafers has been developed using a microplasma jet apparatus for rapid micromachining.

Referência(s)
Altmetric
PlumX