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Reduction of charging effects using vector scanning in the scanning electron microscope

2001; Wiley; Volume: 23; Issue: 6 Linguagem: Inglês

10.1002/sca.4950230606

1932-8745

John T. L. Thong, K. W. Lee, W.K. Wong,

Advanced Electron Microscopy Techniques and Applications

We describe a vector scanning system to reduce charging effects during scanning electron microscope (SEM) imaging. The vector scan technique exploits the intrinsic charge decay mechanism of the specimen to improve imaging conditions. We compare SEM images obtained by conventional raster scanning versus vector scanning to demonstrate that vector scanning successfully reduces specimen-charging artifacts.