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Hybrid high refractive index polymer coatings

2005; SPIE; Volume: 5724; Linguagem: Inglês

10.1117/12.589149

1996-756X

Yubao Wang, Tony D. Flaim, Ramil Mercado, Shelly Fowler, D. E. Holmes, Curtis Planje,

Semiconductor materials and devices

Thermally curable hybrid high refractive index polymer solutions have been developed. These solutions are stable up to 6 months under room temperature storage conditions and can be easily spin-coated onto a desired substrate. When cured at elevated temperature, the hybrid polymer coating decomposes to form a metal oxide-rich film that has a high refractive index. The resulting films have refractive indices higher than 1.90 in the entire visible region and achieve film thicknesses of 300-900 nm depending on the level of metal oxide loading, cure temperature being used, and number of coatings. The formed films show greater than 90% internal transmission in the visible wavelength (400-700 nm). These hybrid high refractive index films are mechanically robust, are stable upon exposure to both heat and UV radiation, and are currently being investigated for microlithographic patterning potential.