PLD fabrication of a soft X-ray multilayer mirror and LPP reflectance test
1998; Elsevier BV; Volume: 127-129; Linguagem: Inglês
10.1016/s0169-4332(97)00766-6
ISSN1873-5584
AutoresI. Weaver, C. L. S. Lewis, A. G. MacPhee, P.J. Warwick, R. Jordan, J. G. Lunney,
Tópico(s)Advanced X-ray Imaging Techniques
ResumoA soft X-ray mirror based on a molybdenum–silicon (Mo/Si) multilayer structure has been fabricated by the pulsed laser deposition (PLD) technique. The multilayer was designed to reflect at 196 Å for normal incidence operation. An iterative graphical procedure was used to calculate the optimum periodic multilayer structure. The normal incidence reflectance of the multilayer was determined using a continuum source of soft X-rays from a laser-produced plasma (LPP). The multilayer peak reflectance was 7.3% at 190 Å, with the magnitude of reflectance consistent with an effective interfacial roughness within the structure equal to ∼15 Å.
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