３方向カンチレバーを用いた多軸触覚センサの作製と基礎特性
2010; Institute of Electrical Engineers of Japan; Volume: 130; Issue: 6 Linguagem: Inglês
10.1541/ieejsmas.130.223
ISSN1347-5525
AutoresHiroto Tachibana, S. Kamanaru, Tatsuya Mima, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Kaoru Yamashita, Minoru Noda, Haruo Noma, M. Higuchi,
Tópico(s)Innovative Energy Harvesting Technologies
ResumoTactile array sensors with three inclined micro-cantilevers embedded in elastomer, which can detect both normal and shear forces, have been designed and fabricated. The inclined cantilevers consist of multilayer of Polymer/NiCr/SiN/Si and the normal and shear forces are detected as resistance change of NiCr thin film induced by deformation of the cantilever. This tactile sensor has sensitivity linear to normal and shear forces. Moreover, this sensor can detect normal and shear force by the resistance changes of 3 cantilevers.
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