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Transparent Conducting Cadmium‐Tin Oxide Films Deposited by RF Sputtering from a CdO ‐ SnO2 Target

1980; Institute of Physics; Volume: 127; Issue: 4 Linguagem: Inglês

10.1149/1.2129786

1945-7111

Naoyuki Miyata, K. Miyake, Kenji Koga, Tetsuya Fukushima,

Thin-Film Transistor Technologies

Transparent conducting films of cadmium‐tin oxide (CTO) were prepared by rf sputtering from a sintered target in an Ar or an atmosphere. The electrical and optical properties of the films were found to depend upon the oxygen concentration in the gas mixture. The films with the lowest resistivity of and high optical transmission of 85% over the visible region were obtained without post‐heat‐treatment.