High Tc superconducting films obtained by pyrolysis of an ultrasonically deposited gel
1989; Elsevier BV; Volume: 174; Linguagem: Inglês
10.1016/0040-6090(89)90900-0
ISSN1879-2731
AutoresM. Langlet, E. Senet, Jean‐Luc Deschanvres, G. Delabouglise, F. Weiss, J.C. Joubert,
Tópico(s)Copper Interconnects and Reliability
ResumoYBa2Cu3O7−x superconducting thin films have been prepared using a technique based on the pyrolysis of an ultrasonically deposited gel containing the Y-Ba-Cu precursors. This technique allows us to control accurately the film thickness and surface homogeneity. MgO single crystals have been used as substrates. Films about 0.2–10 μm in thickness have been annealed in air at 500°C, heated in oxygen at temperatures ranging from 850 to 1000°C and then slowly cooled in oxygen to room temperature. This method leads to well-crystallized YBa2Cu3O7−x films with a grain size and a texture in the 001 direction depending on the heat treatment conditions. X-ray diffraction, scanning electron microscopy and resistivity measurements are presented in this paper and discussed as a function of the film thickness and experimental conditions.
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