Synthesis of sub-surface oxide layers by hybrid metal–gas co-implantation into metals
1998; Elsevier BV; Volume: 103-104; Linguagem: Inglês
10.1016/s0257-8972(98)00426-5
ISSN1879-3347
AutoresI.G. Brown, F Liu, O.R. Monteiro, K. M. Yu, Peter J. Evans, N. Dytlewski, A. Öztarhan, Sean G. Corcoran, D. A. Crowson,
Tópico(s)Vacuum and Plasma Arcs
ResumoSub-surface oxide layers can be synthesized by implantation of mixed metal–gas ion beams formed by a modified vacuum arc ion source. The particle current fractions of the metal and gas ion components in the beam can be controlled from 100% metallic up to approximately 80% gaseous depending on the ion source operational parameters. We have carried out some exploratory investigations of surfaces modified by co-implantation in this way, particularly of stainless steel ion implanted with Al+O and (separately) Zr+O. Due to the ubiquitous surface layer of native oxide present on the steel substrate, additional oxygen can be recoil-implanted, and the resultant implantation can be different from that expected—the effect of the energetic oxygen ion beam is clouded by the recoil implanted oxygen. To help elucidate this complicated scenario, we have carried out a number of metal–gas co-implantation experiments in various kinds of materials. Here, we briefly describe the ion source modifications and the co-implantation process, and report on the state of our understanding of the overall sub-surface layer structure and the tribological benefits of this kind of surface modification.
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