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Density of Silicon Crystals

1994; IOP Publishing; Volume: 31; Issue: 3 Linguagem: Inglês

10.1088/0026-1394/31/3/008

1681-7575

Mitsuru Tanaka, A. Peuto,

Integrated Circuits and Semiconductor Failure Analysis

Measurements of silicon crystal density for the determination of the Avogadro constant are reviewed. Volume, mass and hydrostatic-weighing measurements are considered from the technical standpoints of error sources and uncertainty of measurement. The outlook on the possibility of achieving experimental uncertainties of less than 10-7 is described. Attention is paid to the necessity of reducing the sources of uncertainty in the density arising from the surface, such as silica layers and damaged crystalline layers.