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Growth by atomic layer epitaxy and characterization of thin films of ZnO

2005; Wiley; Volume: 2; Issue: 3 Linguagem: Inglês

10.1002/pssc.200460660

1862-6351

K. Kopalko, Anna Wójcik, M. Godlewski, E. Łusakowska, W. Paszkowicz, J. Z. Domagała, M. Godlewski, A. Szczerbakow, K. Świątek, K. Dybko,

Ga2O3 and related materials

physica status solidi (c)Volume 2, Issue 3 p. 1125-1130 Original Paper Growth by atomic layer epitaxy and characterization of thin films of ZnO K. Kopalko, Corresponding Author K. Kopalko kopal@ifpan.edu.pl Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, PolandPhone: +48 22 8436861, Fax: +48 22 8430926Search for more papers by this authorA. Wójcik, A. Wójcik Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, Poland Dep. of Mathem. and Natural Sci. College of Science, Cardinal S. Wyszynski Univ., Warsaw, PolandSearch for more papers by this authorM. Godlewski, M. Godlewski Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, Poland Dep. of Mathem. and Natural Sci. College of Science, Cardinal S. Wyszynski Univ., Warsaw, PolandSearch for more papers by this authorE. Łusakowska, E. Łusakowska Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, PolandSearch for more papers by this authorW. Paszkowicz, W. Paszkowicz Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, PolandSearch for more papers by this authorJ.Z. Domagała, J.Z. Domagała Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, PolandSearch for more papers by this authorM.M. Godlewski, M.M. Godlewski Dept. of Physiology, Biochem., Pharmacology and Toxicology, Fac. of Veterinary Medicine, Warsaw Agriculture University, Warsaw, PolandSearch for more papers by this authorA. Szczerbakow, A. Szczerbakow Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, PolandSearch for more papers by this authorK. Świątek, K. Świątek Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, PolandSearch for more papers by this authorK. Dybko, K. Dybko Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, PolandSearch for more papers by this author K. Kopalko, Corresponding Author K. Kopalko kopal@ifpan.edu.pl Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, PolandPhone: +48 22 8436861, Fax: +48 22 8430926Search for more papers by this authorA. Wójcik, A. Wójcik Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, Poland Dep. of Mathem. and Natural Sci. College of Science, Cardinal S. Wyszynski Univ., Warsaw, PolandSearch for more papers by this authorM. Godlewski, M. Godlewski Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, Poland Dep. of Mathem. and Natural Sci. College of Science, Cardinal S. Wyszynski Univ., Warsaw, PolandSearch for more papers by this authorE. Łusakowska, E. Łusakowska Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, PolandSearch for more papers by this authorW. Paszkowicz, W. Paszkowicz Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, PolandSearch for more papers by this authorJ.Z. Domagała, J.Z. Domagała Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, PolandSearch for more papers by this authorM.M. Godlewski, M.M. Godlewski Dept. of Physiology, Biochem., Pharmacology and Toxicology, Fac. of Veterinary Medicine, Warsaw Agriculture University, Warsaw, PolandSearch for more papers by this authorA. Szczerbakow, A. Szczerbakow Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, PolandSearch for more papers by this authorK. Świątek, K. Świątek Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, PolandSearch for more papers by this authorK. Dybko, K. Dybko Institute of Physics, Polish Acad. of Sciences, Al. Lotników 32/46, 02-668 Warsaw, PolandSearch for more papers by this author First published: 16 February 2005 https://doi.org/10.1002/pssc.200460660Citations: 15AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinked InRedditWechat Abstract ABSTRACT Atomic layer epitaxy (ALE) was applied to grow thin films of monocrystalline and polycrystalline ZnO. Monocrystalline films were obtained only for GaN/Al2O3 substrates, whereas use of sapphire, silicon or soda lime glass resulted in either 3D growth mode or in polycrystalline films showing preferential orientation along the c axis. Successful Mn doping of ZnO films is reported, when using organic Mn precursors. (© 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim) Citing Literature Volume2, Issue3February 2005Pages 1125-1130 RelatedInformation