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Reflection electron energy loss spectroscopy of keV bombarded polystyrene at high ion fluences

1989; Elsevier BV; Volume: 37-38; Linguagem: Inglês

10.1016/0168-583x(89)90281-4

1872-9584

Giovanni Marletta, Antonino Licciardello, L. Calcagno, Gaetano Foti,

Integrated Circuits and Semiconductor Failure Analysis

Abstract Reflection Electron Energy Loss Spectroscopy (REELS) is used to characterize the surface of thin films of polystyrene bombarded with keV ion beams in the fluence range 1 × 10 14 −1 × 10 16 ions/cm 2 . The characteristic features of REELS spectra of irradiated samples are in agreement with the formation of a hydrogenated amorphous carbon phase. The bulk plasmon shift and the inelastic scattering increase in the low-energy range of REELS spectra showed that the final structure is correlated to the total ion energy loss ( S t ) and to the predominant elastic or inelastic stopping regime. In particular, samples irradiated at a high S t an predominant elastic regime show a higher film density and a higher valence electron density with respect to those irradiated at a low S t and a predominant inelastic regime.