Application of three-dimensional micro-optical components formed by lithography, electroforming, and plastic molding
1993; Optica Publishing Group; Volume: 32; Issue: 32 Linguagem: Inglês
10.1364/ao.32.006464
ISSN0003-6935
AutoresKarl‐Heinz Brenner, M. Küfner, Stefan Küfner, J. Moisel, Anke-Susanne Müller, Stefan Sinzinger, Markus E. Testorf, J. Göttert, J. Mohr,
Tópico(s)Advanced optical system design
ResumoMicro-optics is usually associated with planar waveguides or integrated optical circuits. In this case the propagation of light is restricted to one or two dimensions, and the three-dimensional nature of light propagation is disregarded. We present a method of fabricating three-dimensional micro-optical components by the so-called LIGA process, a lithography, electroforming, and plastic molding process in which poly(methyl methacrylate) is structured by high-energy synchrotron radiation. We demonstrate an experimental system of image formation that uses microprisms and microlenses for a threedimensional microintegration of optical components.
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