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A novel low temperature plasma generator with alumina coated electrode for open air material processing

1998; Elsevier BV; Volume: 316; Issue: 1-2 Linguagem: Inglês

10.1016/s0040-6090(98)00390-3

1879-2731

Manabu Koide, Takao Horiuchi, Takashi Inushima, B.J Lee, Mitsuru TOBAYAMA, Hideomi Koinuma,

Plasma Applications and Diagnostics

Based on our previous studies on a cold plasma torch which can generate homogenous and stable plasma under atmospheric pressure, we have developed a new plasma generator to give a lower gas temperature and wider processing area. Instead of the insulator-covered anode in the previous torch, an aluminum cathode with anodically oxidized alumina worked to generate a stable plasma in helium gas flow under atmospheric pressure by the application of rf (13.56 MHz) power between the cathode and a grounded conductive anode. The plasma exhibited light emission from high energy species as well as a very low gas temperature below 100°C. Preliminary results of material processing by this plasma are also presented.