Selective amplification of self-resistively heated laser-direct-written tungsten lines
1988; American Institute of Physics; Volume: 52; Issue: 26 Linguagem: Inglês
10.1063/1.99768
ISSN1520-8842
Autores Tópico(s)nanoparticles nucleation surface interactions
ResumoLaser-direct-write pyrolytic deposition of tungsten at 514.5 nm, out of the WF6 /H2 reduction system, was carried out on Al2O3 substrates between sputtered-on gold contact pads. Heat, generated by pulsed current sent through the laser-induced microdeposit, is used to amplify the microstructure by a conventional, however well localized, chemical vapor deposition process. In addition to tungsten, other more volatile materials can be deposited for amplification.
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