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Plasma-based Ion Implantation Facility and Research at the National Accelerator Centre, Faure

1999; American Institute of Physics; Volume: 17; Issue: 2 Linguagem: Inglês

10.1116/1.590643

1520-8567

V.M. Prozesky, K. Meyer, M. J. Alport, C.M. Comrie,

Ion-surface interactions and analysis

A new plasma-based ion implantation (PBII) facility consisting of a dedicated PBII chamber plus characterization equipment has been established at the Van de Graaff Group, National Accelerator Centre, Faure. The implantation unit has an aluminum vacuum chamber with a volume of 1 m3, and it incorporates conventional plasma generation capability for gas plasmas, such as a set of multifilaments. The implantation power supply is capable of delivering 30 kV, with a pulse duration of up to 1000 μs, and a repetition rate of 1 kHz. This allows a maximum average load of 12 J to the target. The facility is being used at the outset for the fundamental study of plasmas, time-dependent x-ray generation during the implantation pulse, and plasma immersion implantation. The facility is supported by a 6 MV Van de Graaff accelerator equipped with the ion-beam analytical tools necessary for characterization of modified surfaces.