The GIF Quantum, a next generation post-column imaging energy filter
2010; Elsevier BV; Volume: 110; Issue: 8 Linguagem: Inglês
10.1016/j.ultramic.2010.01.009
ISSN1879-2723
AutoresA.J. Gubbens, M Barfels, Colin Trevor, Ray D. Twesten, Paul Mooney, Paul J. Thomas, N K Menon, B. Kraus, Chengye Mao, Brian McGinn,
Tópico(s)Advancements in Photolithography Techniques
ResumoWe describe a new post-column imaging energy filter for (scanning) transmission electron microscopy from 60 to 300 kV operating voltage. The completely redesigned GIF quantum has a gradient magnetic prism, dodecapole optics, a 10-times faster 40 Mpixel/sec CCD camera, a 1 μs electrostatic shutter, and new user interface, control, and auto-alignment software. An 8 dodecapole lens system, performs full 2nd and 3rd, and partial 4th and 5th order aberration correction. The improved aberration correction has allowed the size of the entrance aperture to be nearly doubled to 9.0 mm compared to current generation post-column designs. The electrostatic shutter provides exposure control down to 1 μs, extending the exposure time range to over 7 orders of magnitude. Spectroscopy operation has been improved with a larger 2 keV field of view at 200 kV, and a maximum acquisition rate of 1000 spectra per second. A high-speed DualEELS mode simultaneously acquires core- and low-loss spectra up to 2 keV apart. A more intuitive user interface includes new capabilities such as automated exposure control and optimized full spectrum acquisition. The auto-alignment software has been significantly enhanced to use the full flexibility of the dodecapole lens system.
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