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High quality factor photonic crystal nanobeam cavities

2009; American Institute of Physics; Volume: 94; Issue: 12 Linguagem: Inglês

10.1063/1.3107263

1520-8842

Parag B. Deotare, Murray W. McCutcheon, Ian W. Frank, Mughees Khan, Marko Lončar,

Optical Coatings and Gratings

We investigate the design, fabrication, and experimental characterization of high quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered one-dimensional photonic crystal mirror and precise control of the cavity length, we designed cavities with theoretical quality factors as high as 1.4×107. By detecting the cross-polarized resonantly scattered light from a normally incident laser beam, we measure a quality factor of nearly 7.5×105. The effect of cavity size on mode frequency and quality factor was simulated and then verified experimentally.