Foil-thickness determination from zone-axis CBED patterns and TEM images for a GaAs/AlAs multilayer in plan view
1992; Elsevier BV; Volume: 41; Issue: 4 Linguagem: Inglês
10.1016/0304-3991(92)90217-8
ISSN1879-2723
Autores Tópico(s)Electron and X-Ray Spectroscopy Techniques
ResumoTwo new methods for accurate determination of local foil thickness for a multilayer in plan view have been introduced. One is the zone-axis CBED method, which is based on the fact that the distance between a weak line and a strong bright line in a satellite HOLZ CBED disc is sensitive to foil thickness. A simple formula is derived, which makes the foil-thickness determination very easy. Another method is based on the observation of fringes relating to the periodic structure of the multilayer. The local foil thickness for a fringe is simply equal to the product of the multilayer period and the fringe number counted from the edge of the specimen. Factors affecting the accuracy in thickness determination are discussed. These two methods are compared with some classical methods.
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