Opto-tactile Sensor for 2D and 3D Measurement of Small Structures on Coordinate Measuring Machines
2001; Elsevier BV; Volume: 50; Issue: 1 Linguagem: Inglês
10.1016/s0007-8506(07)62140-4
ISSN1726-0604
AutoresH. Schwenke, F. Wäldele, Ch. Weiskirch, H. Kunzmann,
Tópico(s)Surface Roughness and Optical Measurements
ResumoA novel tactile probing system for dimensional measurement of small structures is presented. The measurement principle combines optical and mechanical techniques and allows probing elements below 50 μm to be realized. The measurement uncertainties achievable are in the sub-micron order. With this full 3D sensitivity on the basis of the opto-tactile concept is achieved. Some exemplary measurements show the capability of the new sensor.
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