PACVD nano-crystalline BCN thin films obtained by use of an organoboron precursor
1997; Elsevier BV; Volume: 6; Issue: 5-7 Linguagem: Inglês
10.1016/s0925-9635(96)00703-0
ISSN1879-0062
AutoresJean‐Philippe Loeffler, I. Konyashin, Joachim Bill, Herbert H. Uhlig, Fritz Aldinger,
Tópico(s)Diamond and Carbon-based Materials Research
ResumoThin films of the BCN system deposited by use of gas mixtures composed of a boron- and nitrogen-containing organic precursor, argon and hydrogen are investigated with the aid of a radiofrequency PACVD procedure. The structure and composition of these films are found to be strongly affected by the mole ratio between the organoboron precursor and hydrogen. The films obtained at high values of this ratio are amorphous: they become partially crystalline on decreasing this ratio. The deposit obtained at a relatively low value of this ratio is composed of a mixture of cubic boron nitride and boron carbide. Use of a considerable excess of hydrogen in the gas mixture is found to allow poorly crystalline and amorphous phases in the BCN system to be completely removed from the deposit.
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