Chemical vapour deposition of boron carbides I: Phase and chemical composition
1989; Elsevier BV; Volume: 172; Issue: 1 Linguagem: Inglês
10.1016/0040-6090(89)90120-x
ISSN1879-2731
AutoresUlf Jansson, J.‐O. Carlsson, Bengt Stridh, Staffan Söderberg, M. Olsson,
Tópico(s)Thermal properties of materials
ResumoDifferent boron carbides were deposited by chemical vapour deposition in a cold-wall reactor from a reaction gas mixture of BCl3, CH4 and H2. The influences of vapour composition, temperature and total pressure on the phase and chemical composition were investigated. One orthorhombic, two tetragonal and two types of rhombohedral boron carbide phases were identified. Diffraction data and chemical composition of the carbides are given. From a comparison of the results from deposition experiments and thermodynamic calculations it was concluded that the deposition took place far from equilibrium.
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