Low loss Chalcogenide glass waveguides by thermal nano-imprint lithography
2010; Optica Publishing Group; Volume: 18; Issue: 18 Linguagem: Inglês
10.1364/oe.18.019286
ISSN1094-4087
AutoresTing Han, Steve Madden, Douglas Bulla, Barry Luther‐Davies,
Tópico(s)Semiconductor Lasers and Optical Devices
ResumoWe report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2-4 µm wide and 1 µm high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550 nm.
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