Fine-tuning of GaAs photonic crystal cavities by digital etching
2007; Elsevier BV; Volume: 84; Issue: 5-8 Linguagem: Inglês
10.1016/j.mee.2007.01.064
ISSN1873-5568
AutoresT. Sünner, Rafael Herrmann, Andreas Löffler, M. Kamp, A. Forchel,
Tópico(s)Optical Coatings and Gratings
ResumoOptical cavities with quality factors above 2 × 105 were realized based on photonic crystal heterostructures in a GaAs membrane. The growth of natural oxide on these structures was investigated by monitoring the resonance wavelength of the cavity over time. A logarithmic time dependence of the oxide thickness was found. Combining surface oxidation over a defined time interval and subsequent oxide removal using a wet chemical treatment, tuning of the resonance wavelength in steps of less than 2 nm was achieved.
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