A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering
1998; Elsevier BV; Volume: 49; Issue: 1-2 Linguagem: Inglês
10.1016/s0925-4005(98)00092-6
ISSN1873-3077
AutoresLie-yi Sheng, Zhenan Tang, Jian Wu, Philip C.H. Chan, J.K.O. Sin,
Tópico(s)Advanced Chemical Sensor Technologies
ResumoThis paper describes a CMOS compatible integrated gas sensor. The device was designed so that the front-end fabrication is fully compatible with the standard CMOS process. The non-CMOS compatible fabrication steps were carried out as post-processing steps. This included the silicon anisotropic etch to create the thermally isolated micro-hotplate (MHP) and the deposition of gas-sensitive thin films using maskless r.f. SnO2 sputtering. The sensors exhibited high sensitivities to gases, such as ethanol and hydrogen.
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