Scanning differential optical profilometer for simultaneous measurement of amplitude and phase variation
1988; American Institute of Physics; Volume: 53; Issue: 1 Linguagem: Inglês
10.1063/1.100118
ISSN1520-8842
AutoresChung W. See, Roland K. Appel, Michael G. Somekh,
Tópico(s)Optical measurement and interference techniques
ResumoA scanning optical profilometer is described which can simultaneously and independently measure the differential phase/amplitude variation of light reflected off an object surface. This information may then be interpreted as topographical and reflectivity variation of the object surface. The system is based on a heterodyne interferometer and uses two beams to probe the surface. The theoretical sensitivity of the system is 3×10−3 mrad in phase and 3 in 105 in reflectivity variation, both measured in a 1 kHz bandwidth. Preliminary measurements of film thickness and reflectivity variation are presented. This system also has potential applications for imaging objects with minute structural variations.
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