Chirped synthetic-wavelength interferometry
1992; Optica Publishing Group; Volume: 17; Issue: 22 Linguagem: Inglês
10.1364/ol.17.001626
ISSN1539-4794
AutoresPeter J. de Groot, John A. McGarvey,
Tópico(s)Advanced Measurement and Metrology Techniques
ResumoWe demonstrate distance measurement by varying, or chirping, the synthetic wavelength in a two-color laser diode interferometer. An absolute accuracy of 3 μm is achieved over a 200-mm range, without the phase ambiguities or optical complexities normally associated with synthetic-wavelength interferometry. The fiber-coupled experimental system uses a 25-μW, 0.25-mm-diameter collimated object beam and can be used for dimensional gauging and rough-surface profiling.
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