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Stress focusing for controlled fracture in microelectromechanical systems

2007; American Institute of Physics; Volume: 90; Issue: 8 Linguagem: Inglês

10.1063/1.2679072

1520-8842

Matthew Meitl, Xue Feng, Jingyan Dong, Etienne Menard, Placid M. Ferreira, Yonggang Huang, John A. Rogers,

Advanced MEMS and NEMS Technologies

This letter describes a strategy for controlling fracture in microelectromechanical systems (MEMSs) based on the control of corner sharpness. Studies of model MEMS structures with round (radius of approximately microns), intermediate, and sharp (<10nm) corners demonstrate the effects of corner sharpness on the concentration of applied stress. Finite-element analysis reveals that stress distributions intensify and localize as sharpness increases, and transfer printing experiments demonstrate the influence of stress concentration on breakability.