High-resolution microgyroscope using vibratory motion adjustment technology
2001; Elsevier BV; Volume: 90; Issue: 1-2 Linguagem: Inglês
10.1016/s0924-4247(01)00460-5
ISSN1873-3069
AutoresHiroshi Kawai, K. Atsuchi, Masaya Tamura, K. Ohwada,
Tópico(s)Advanced Fiber Optic Sensors
ResumoA new technology has been developed that reduces mechanical coupling between the driving and sensing modes of a vibratory microgyroscope. The vibrator of the microgyroscope is driven horizontally by electrostatic force, and vertical deviations are detected capacitively. CAD simulations revealed one cause of mechanical coupling to be the asymmetry of the vibrator. The new technology employs two different dc bias voltages to adjust the vibratory motion of a microgyroscope so as to reduce the mechanical coupling. Microgyroscopes fabricated with the new technology have an extremely low noise-equivalent angular rate of 0.013°/s at a bandwidth of 10 Hz, and a resolution of 0.0041°/s/Hz1/2.
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