Portal de Periódicos da CAPES

<title>Laser microprocessing and its applications in the microelectronics industry</title>

2001; SPIE; Linguagem: Inglês

10.1117/12.413755

1996-756X

Yongfeng Lu, Zhong‐Min Ren,

Laser Material Processing Techniques

Laser micro processing technology has been applied to industries in a number of aspects: (1) laser cleaning, laser deflash and plasma-assisted laser micro processing, (2) laser texturing, laser bumping and related technologies, (3) real-time monitoring of laser surface processing, (4) laser- induced controllable periodic structures and (5) laser nano- etching and nano lithography by tip-enhanced laser irradiation.